G1 models satisfy the demand for the next generation of semiconductor production. FEATURES Multi-gas, multi-range selection Pressure-insensitive operation Valve shut-off function LCD display (temp, pressure, set, output) easifies control routines BENEFITS Great inlet pressure change insensitivity Allows one mass flow controller to handle two or more gas types and ranges The need for dedicated devices is reduced to only a few models

Fitted between the cylinder and the regulator, preventing freezing inside the regulator.

Manual change-over gas supply manifold for non-corrosive gases and mixtures up to grade 6.0. For the connection of 2x1 cylinder with a maximum filling pressure of 200 bar. Diaphragm type regulator and isolation valve. Continous gas supply during cylinder change For wall mounting or gas cylinder cabinet mounting For inert, reactive, flammable and oxidizing gases and gas mixtures Excellent and accurate Pressure control Designed to minimize c

Manual change-over gas supply manifold for non-corrosive gases and mixtures up to grade 6.0. For the connection of 2×1 cylinder with a maximum filling pressure of 200 bar. Diaphragm type regulator and isolation valve. Continuous gas supply during cylinder change For wall mounting or gas cylinder cabinet mounting. For inert, reactive, flammable and oxidizing gases and gas mixtures Excellent and accurate Pressure control Designed to mi

This single-stage gas supply panel is mounted onto a stainless steel console and consists of a pressure regulator with inlet and outlet pressure gauges, shut-off valve and rupture disk. APPLICATION These gas supply panels are used for low flow rates of high purity gases and special gases. Process gas purging All connections welded or VCR Pressure regulator with tied diaphragm Springless diaphragm valve with 90° turn lever Rupture dis

Double-stage, for inert gases and gas mixtures. Gas purity up to 5.0. Inlet pressure 230 bar / 3300 psi and outlet pressure range 0,05 - 10 bar / 0,7- 145 psi. The PRIOR is a double-stage cylinder regulator with the first stage preset and a second adjustable one to achieve a very constant pressure level independent of the inlet pressure level. This regulator is equipped with second stage bellows, which ensures high quality, outstanding performan

This single-stage gas supply panel is mounted onto a stainless steel console and consists of a gauge, shut-off valve and rupture disk. The gas stock is connected via a purgeable cylinder valve so that the station can be purged with external gas. APPLICATION These gas supply panels are used for low flow rates of high purity gases and special gases. For low flow rates and low downstream pressures External gas purging with FAV 903 Springless

This single-stage gas supply panel is mounted onto a stainless steel console and consists of a pressure regulator with inlet and outlet pressure gauges, downstream shut-off valve and rupture disk. The gas stock is connected via a purgeable cylinder valve so that the station can be purged with inert gas. APPLICATION These gas supply panels are used for low flow rates by low pressure for reactive or corrosive gases. Pressure regulator with tie

G3 models satisty the demand for the next generation of samiconductor production. FEATURES Multi-gas,multi-range selection Pressure-insensitive operation Pl LCD display (temp, pressure, set output) easifies control routines Self celibration function BENEFITS Great inlet pressure change insensitivity Allows one mass flow controller to handle two or more gas types and ranges The need for dedicated devices is reduced to only a few mod

With industry-leading flow control technology, Aera PI-980 Series pressure - insensitive MFCs (mass flow controllers) anticipate the increasing demands of next-generation semiconductor manufacturing processes, including etch, CVD, PVD, and diffusion. FEATURES Pressure-insensitive operation High accuracy and repeatability Integrated gas panel components Live gas certified, multi-gas, multi-range configuration Field programmable DeviceNet,