Single-stage pressure regulator for gases up to purity 6.0. Includes an upstream purge block for inert purging, upstream and  downstream pressure gauges, a relief valve, and a modular range of cylinder connectors and outlet connections. Maximum safety by inert gas purging For inert, reactive, flammable and oxidizing gases and gas mixtures (not for oxygen) Excellent and accurate Pressure control Designed to minimize contamination Low i

As the field-proven standard for a range of applications, Hitach Metal's® FC-R7700 series delivers precise flow control while offering the economic benefits of elastomer seals. FEATURES Elastomer seals VCR®, VCO®, and Swagelok® compatible connections Full-scale flow ranges from 10 sccm to 200 slm Normally-closed or normally-open solenoid control valve Leak integrity of 1x10-6 atm-cc/sec of He BENEFITS Fast response -

G2 models satisfy the demand for the next generation of semiconductor production. FEATURES Multi-gas, multi-range selection Valve shut-off function Self calibration function BENEFITS Shortening gas purge time needed Complete gas shut-off Gas leaking volume 1/10 related to that with a standard combination (MFC and pneumatic valve) Reduction of gas surge Allows one mass flow controller to handle two or more gas types and ranges The

Hitachi Metals Area® FC-R7800 series delivers precise flow control, as well as the corrosion resistance and high leak integrity of metal seals, to suit the majority of gas-controlled applications. FEATURES Corrosion-resistant design Metal seals VCR®, Swagelok® compatible connections Full-scale flow ranges from 10 sccm to 200 slm Normally-closed or normally -open solenoid control valve Leak integrity of 1 × 10-10 atm-cc/

SFC-1580/1680 series is the high temperature version of compact digital Mass Flow Controllers. A separate control unit with heat proofed connection, a lower sensor heating temperature, and high temperature piezo-stack are used. A simple valve structure, which does not compress and expand gas, prevents re-condensation. FEATURES Higher operating temperature 150 °C Built-in structure to prevent recondensation Fast response < 1 sec flow

Worldwide, the Aera name is synonymous with high-quality, highperforming designs that are backed by exceptionally responsive customer service. FEATURES Multi-gas, multi-range selection Fast response All-metal seals Field programmable* Wide range of gas selection without recalibration* DeviceNet, RS-485, or analog control Multiple alarm and diagnostic capabilities RoHS compliant *Available in multi-gas, multi-range Transformer MFCs

Aera®FC-DR980 series digital MFCs (mass flow controllers) and MFMs (mass flow meters) deliver performance excellence and operational versatility, resulting in significant cost savings and ease of use. FEATURES Multi-gas, multi-range selection* Analog, analog/digital, and digital modes Piezoelectric control valves Multipl alarm and dianostic capabilities Metal seals, with a 1 × 10-10 leak integrity Electropolished and ultra-clea

This highly advanced SAM® brand model with advanced sensor and valve technology, field-proven components and high-speed, digital circuitry delivers presice flow control even at very low flow rate down to 1 SCCM. Designed with field-proven components and high-speed digital circuitry, FX has achieved superior reliability performance with < 0,5 % zero drift over one year and superior repeatability of 0,06 % of full scale. Comprehensive commu

G4 models is the most advanced MFC meeting or exceeding the demand of the actual and also the next generation of semiconductor production. FEATURES Multi-gas, multi-range selection Pressure-insensitive operation Valve shut-off function In-line integrated flow verification system Self celibration function LCD display (temp, pressure, set, output) easifies control routines BENEFITS Great inlet pressure change insensitivity Allows on

Fitted between the cylinder and the regulator, preventing freezing inside the regulator.